Sorry, I use tools and equipment interchangably. It is my process engineer background. A piece of equipment is a tool to get the product that you want.

In cmms, I think it's necessary to distiguish handtools or machinery like cranes, forklifts, trailers from process equipment because they are considered different items with different sets of characteristics (or popularly known as data sheets by process engineers).

Again have to use asset structure to represent the plant/facility configuration.

Give example of linked and cluster tools & subsystems eg PFD or P&ID if you want to discuss further.

Yes there is one whicnh I have personally implemented in over 15 fabs environments worldwide. It has a real time E10 compliant state model, supports Cluster Tool RAM, utilizing Intended Process Paths and has the ability to use state rules to modify states based upon parent child relationships. The product is calles Xsite and is sold by Brooks Automation. The new version (Xsite 3.x) is not as simple to use as the older version (2.81) is substantially more expensive and requires much more cosulting service from the vendor.

Please let me know if you have more questions.

sdiiorio@semitechgroup.com

If you don't mind, kindly explain the meanings of the follwings:
1) real time E10 compliant state model
2) supports Cluster Tool RAM
3) ability to use state rules to modify states based upon parent child relationships

Sure, What I mean by real time state model is that the system will keep track of the state of an equipment, based on what is being done at that time. The 43 states in the model I refer to define all the conditions the system may be in and are all substates of the 6 defined in SEMI E10.
Cluster Tool is defined in E10 as "a manufacturing system made up of integrated processing modules mechanically linked together (the modules may or may not come from the same supplier)". RAM (Reliability, Availability and Maintainability) for some of these systems "4.1.2.2 multi-path cluster tool — a cluster tool with more than one independent process flow path (e.g., multiple load ports/load-locks, multiple process chambers of the same type) and used as such" is difficult to measure due to their nature, part of the system is running and part is down. Methofds are defined which require significant levels of automation to achieve.
State Rules allow the state of the parent system to change as the state of it's children change, without user intervention.